Impact of atomic layer deposition temperature on electrical and optical properties of ZnO:Al films

Autor: Masmitjà, Gerard, Estarlich, Pau, Lopez, Gema, Martín, Isidro, Voz, Cristobal, Placidi, Marcel, Torrens, Arnau, Saucedo Silva, Edgardo, Vasquez, Pia, Muñoz, Delfina, Puigdollers, Joaquim, Ortega, Pablo
Zdroj: In Journal of Science: Advanced Materials and Devices June 2024 9(2)
Databáze: ScienceDirect