Effect of oxygen plasma treatment on the properties of ALD hafnium oxide films
| Autor: | Bulyarskiy, Sergey V., Litvinova, Kristina I., Rudakov, Grigory A., Shibalova, Anastasia A., Gusarov, Georgy G. |
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| Zdroj: | In Surfaces and Interfaces December 2024 55 |
| Databáze: | ScienceDirect |
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