A design of green slurry for copper/cobalt barrier-step chemical mechanical polishing with controlled removal selectivity and dynamic galvanic corrosion inhibition
| Autor: | Chang, Pengfei, Huang, Zisheng, Ling, Huiqin, Wu, Yunwen, Li, Ming, Hang, Tao ⁎ |
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| Zdroj: | In Surfaces and Interfaces December 2024 55 |
| Databáze: | ScienceDirect |
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