Tackling residual tensile stress in AlN-on-Si nucleation layers via the controlled Si(111) surface nitridation
| Autor: | Milakhin, Denis, Malin, Timur, Mansurov, Vladimir, Maidebura, Yan, Bashkatov, Dmitriy, Milekhin, Ilya, Goryainov, Sergey, Volodin, Vladimir, Loshkarev, Ivan, Vdovin, Vladimir, Gutakovskii, Anton, Ponomarev, Sergei, Zhuravlev, Konstantin |
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| Zdroj: | In Surfaces and Interfaces August 2024 51 |
| Databáze: | ScienceDirect |
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