High thermal stability of the reflectivity of Be/Al multilayer mirrors designed for extreme ultraviolet wavelength

Autor: Kumar, Niranjan, Panda, Kalpataru, Pleshkov, Roman S, Nezhdanov, Aleksey V, Polkovnikov, Vladimir N, Yunin, Pavel A, Chkhalo, Nikolay I
Zdroj: In Surfaces and Interfaces November 2023 42 Part A
Databáze: ScienceDirect