High thermal stability of the reflectivity of Be/Al multilayer mirrors designed for extreme ultraviolet wavelength
Autor: | Kumar, Niranjan, Panda, Kalpataru, Pleshkov, Roman S, Nezhdanov, Aleksey V, Polkovnikov, Vladimir N, Yunin, Pavel A, Chkhalo, Nikolay I |
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Zdroj: | In Surfaces and Interfaces November 2023 42 Part A |
Databáze: | ScienceDirect |
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