Experimental demonstration of the strong impact of plasma excitation frequency range on electronic properties of silicon nitride/GaAs interfaces
| Autor: | Richard, Olivier, Mziouek, Hasna, Arès, Richard, Aimez, Vincent, Jaouad, Abdelatif |
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| Zdroj: | In Surfaces and Interfaces August 2023 40 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect