Optical monitoring of DC/RF plasma sputtering for copper oxide film growth at low temperature
| Autor: | Farhadian-Azizi, Khadijeh, Abbasi-Firouzjah, Marzieh, Abbasi, Majid, Hashemzadeh, Mojtaba |
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| Zdroj: | In Surfaces and Interfaces August 2023 40 |
| Databáze: | ScienceDirect |
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