Comprehensive investigation of Er2O3 thin films grown with different ALD approaches
| Autor: | Khomenkova, L., Merabet, H., Chauvat, M.-P., Frilay, C., Portier, X., Labbe, C., Marie, P., Cardin, J., Boudin, S., Rueff, J.-M., Gourbilleau, F. |
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| Zdroj: | In Surfaces and Interfaces November 2022 34 |
| Databáze: | ScienceDirect |
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