Influence of pulsed Al deposition on quality of Al-rich Al(Ga)N structures grown by molecular beam epitaxy

Autor: Majchrzak, Dominika, Grodzicki, Miłosz, Moszak, Karolina, Zdanowicz, Ewelina, Serafińczuk, Jarosław, Pucicki, Damian, Kudrawiec, Robert, Hommel, Detlef
Zdroj: In Surfaces and Interfaces December 2021 27
Databáze: ScienceDirect