Finish-pass strategy to improve sidewall angle and processing time in FIB milled structures
| Autor: | Lid, Markus Joakim, Afif, Abdulla Bin, Torgersen, Jan, Prinz, Fritz B. |
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| Zdroj: | In Procedia Structural Integrity 2021 34:266-273 |
| Databáze: | ScienceDirect |
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