Research of morphology and structure of 3C–SiC thin films on silicon by electron microscopy and X-ray diffractometry
| Autor: | Gusev, Alexander S., Ryndya, Sergei M., Zenkevich, Andrei V., Kargin, Nikolai I., Averyanov, Dmitrii V., Grekhov, Maksim M. |
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| Zdroj: | In Modern Electronic Materials December 2015 1(4):120-125 |
| Databáze: | ScienceDirect |
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