Sustainability in Semiconductor Production via Interpretable and Reliable Predictions
| Autor: | Fathi, Kiavash, Stramaglia, Maria, Ristin, Marko, Sadurski, Marcin, Kleinert, Tobias, Schönfelder, Robert, van de Venn, Hans Wernher |
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| Zdroj: | In IFAC PapersOnLine 2024 58(4):174-179 |
| Databáze: | ScienceDirect |
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