Data-driven Prognostic Approaches for Semiconductor Manufacturing Process: A Review of Recent Works and Future Perspectives
| Autor: | JAMAL, Dima EL, ANANOU, Bouchra, GRATON, Guillaume, OULADSINE, Mustapha, PINATON, Jacques |
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| Zdroj: | In IFAC PapersOnLine 2023 56(2):3716-3724 |
| Databáze: | ScienceDirect |
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