Alarm Activations Analysis for Performance Enhancement in a Semiconductor Facility
| Autor: | Al-kharaz, Mohammed *, Ananou, Bouchra *, Ouladsine, Mustapha *, Combal, Michel, Pinaton, Jacques |
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| Zdroj: | In IFAC PapersOnLine 2022 55(6):439-444 |
| Databáze: | ScienceDirect |
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