Bayesian optimization for Tuning Lithography Processes
| Autor: | Guler, Sila, Schoukens, Maarten, Perez, Taciano Dreckmann, Husakowski, Jerzy |
|---|---|
| Zdroj: | In IFAC PapersOnLine 2021 54(7):827-832 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Guler, Sila, Schoukens, Maarten, Perez, Taciano Dreckmann, Husakowski, Jerzy |
|---|---|
| Zdroj: | In IFAC PapersOnLine 2021 54(7):827-832 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|