Image-Based Parametric Pattern Recognition for Micro- and Nano- Defect Detection

Autor: Belikov, Sergey , Su, Chanmin ⁎⁎, Enachescu, Marian ⁎⁎⁎
Zdroj: In IFAC PapersOnLine 2020 53(2):8591-8598
Databáze: ScienceDirect