Trans-scale Nanofabrication with Nanopositioning and Nanomeasuring Machines
| Autor: | Meister, Andreas, Weidenfeller, Laura, Kirchner, Johannes, Hofmann, Martin, Mastylo, Rostyslav, Füßl, Roland, Reger, Johann, Manske, Eberhard |
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| Zdroj: | In IFAC PapersOnLine 2019 52(15):151-156 |
| Databáze: | ScienceDirect |
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