On nanopositioning control of a cantilever with electrostatic actuation and tunneling current sensing based on multi-mode modelling
| Autor: | Voda, Alina *, Besançon, Gildas *, Ryba, Łukasz ** |
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| Zdroj: | In IFAC PapersOnLine July 2017 50(1):15548-15553 |
| Databáze: | ScienceDirect |
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