Virtual metrology on semiconductor manufacturing based on Just-in-time learning
Autor: | Jebri, M.A., El Adel, E.M., Graton, G., Ouladsine, M., Pinaton, J. |
---|---|
Zdroj: | In IFAC PapersOnLine 2016 49(12):89-94 |
Databáze: | ScienceDirect |
Externí odkaz: |
Autor: | Jebri, M.A., El Adel, E.M., Graton, G., Ouladsine, M., Pinaton, J. |
---|---|
Zdroj: | In IFAC PapersOnLine 2016 49(12):89-94 |
Databáze: | ScienceDirect |
Externí odkaz: |