Demolded hollow high aspect-ratio parylene-C micropillars for real-time mechanosensing applications

Autor: Chmelikova, Larisa, Fecko, Peter, Chmelik, Jiri, Skacel, Josef, Otahal, Alexandr, Fohlerova, Zdenka
Zdroj: In Applied Materials Today April 2023 31
Databáze: ScienceDirect