PECVD Processing of low bandgap-energy amorphous hydrogenated germanium-tin (a-GeSn:H) films for opto-electronic applications
| Autor: | de Vrijer, Thierry, Roodenburg, Koos, Saitta, Federica, Blackstone, Thijs, Limodio, Gianluca, Smets, Arno H.M. |
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| Zdroj: | In Applied Materials Today June 2022 27 |
| Databáze: | ScienceDirect |
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