Self-regulated parallel process 3-D array microfabrication with metal direct-write
| Autor: | Zhang, Yong, Lin, Yen-Po, Zhang, Xianyun, Zhang, Yifan, Guo, Jianjun |
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| Zdroj: | In Applied Materials Today September 2021 24 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Zhang, Yong, Lin, Yen-Po, Zhang, Xianyun, Zhang, Yifan, Guo, Jianjun |
|---|---|
| Zdroj: | In Applied Materials Today September 2021 24 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect