Self-regulated parallel process 3-D array microfabrication with metal direct-write
Autor: | Zhang, Yong, Lin, Yen-Po, Zhang, Xianyun, Zhang, Yifan, Guo, Jianjun |
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Zdroj: | In Applied Materials Today September 2021 24 |
Databáze: | ScienceDirect |
Externí odkaz: |