Influence of magnetron sputtering process on the stability of WO3 thin film gas sensor
Autor: | Zhu, Chaoqi, Lv, Tao, Yang, Huimin, Li, Xiang, Wang, Xiaoxia, Guo, Xiang, Xie, Changsheng, Zeng, Dawen |
---|---|
Zdroj: | In Materials Today Communications March 2023 34 |
Databáze: | ScienceDirect |
Externí odkaz: |