Inhibition of interlayer diffusion and reduction of impurities in thin metal films by ion irradiation
| Autor: | Kruhlov, I.O., Orlov, A.K., Dubikovskyi, O., Iguchi, Y., Erdélyi, Z., Sidorenko, S.I., Ishikawa, T., Prikhodko, S.V., Voloshko, S.M. |
|---|---|
| Zdroj: | In Materials Today Communications November 2022 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect