Nanomechanical properties of the ZEP-520 electron beam resist film
| Autor: | Pan, J.C., Lang, F.C. *, Zhao, X.P., Hou, X.H., Li, J.J. |
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| Zdroj: | In Materials Today Communications June 2021 27 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Pan, J.C., Lang, F.C. *, Zhao, X.P., Hou, X.H., Li, J.J. |
|---|---|
| Zdroj: | In Materials Today Communications June 2021 27 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect