Through glass via (TGV) copper metallization and its microstructure modification
Autor: | Chang, Yu-Hsun, Lin, Yu-Ming, Lee, Cheng-Yu, Hsu, Pei-Chia, Chen, Chih-Ming, Ho, Cheng-En |
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Zdroj: | In Journal of Materials Research and Technology July-August 2024 31:1008-1016 |
Databáze: | ScienceDirect |
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