Through glass via (TGV) copper metallization and its microstructure modification

Autor: Chang, Yu-Hsun, Lin, Yu-Ming, Lee, Cheng-Yu, Hsu, Pei-Chia, Chen, Chih-Ming, Ho, Cheng-En
Zdroj: In Journal of Materials Research and Technology July-August 2024 31:1008-1016
Databáze: ScienceDirect