Deposition processes of superhard diamond-like carbon films co-adjusted by ion energy and ion flux in arc discharges
| Autor: | Wang, Minglei, Zhang, Lin, Lin, Guoqiang |
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| Zdroj: | In Journal of Materials Research and Technology March-April 2024 29:4151-4162 |
| Databáze: | ScienceDirect |
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