Plasma power effect on crystallinity and density of AlN films deposited by plasma enhanced atomic layer deposition
| Autor: | Zhang, Xiao-Ying, Peng, Duan-Chen, Yan, Jia-Hao, Zhang, Zhi-Xuan, Ruan, Yu-Jiao, Zuo, Juan, Xie, An, Wu, Wan-Yu, Wuu, Dong-Sing, Huang, Chien-Jung, Lai, Feng-Min, Lien, Shui-Yang, Zhu, Wen-Zhang |
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| Zdroj: | In Journal of Materials Research and Technology November-December 2023 27:4213-4223 |
| Databáze: | ScienceDirect |
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