Network hydration, ordering and composition interplay of chemical vapor deposited amorphous silica films from tetraethyl orthosilicate
| Autor: | Diallo, Babacar, Topka, Konstantina C., Puyo, Maxime, Lebesgue, Charlotte, Genevois, Cécile, Laloo, Raphael, Samelor, Diane, Lecoq, Hélène, Allix, Mathieu, Vergnes, Hugues, Senocq, François, Florian, Pierre, Sarou-Kanian, Vincent, Sauvage, Thierry, Menu, Marie-Joelle, Caussat, Brigitte, Turq, Viviane, Vahlas, Constantin, Pellerin, Nadia |
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| Zdroj: | In Journal of Materials Research and Technology July-August 2021 13:534-547 |
| Databáze: | ScienceDirect |
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