Design of electrostatic actuated MEMS biaxial scanning micro-mirror with serpentine structure
| Autor: | Sadhukhan, Dhrubajyoti, Prasad Singh, Gajendra |
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| Zdroj: | In Materials Today: Proceedings 2022 65 Part 1:229-234 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Sadhukhan, Dhrubajyoti, Prasad Singh, Gajendra |
|---|---|
| Zdroj: | In Materials Today: Proceedings 2022 65 Part 1:229-234 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
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