Effects of deposition time and RF power on the film characteristics of magnetron sputtered silicon carbide thin films
| Autor: | Oladijo, O.P., Sanjay, M.R., Collieus, L.L., Siengchin, S., Moloisane, L., Oladijo, S.S. |
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| Zdroj: | In Materials Today: Proceedings 2022 52 Part 5:2432-2438 |
| Databáze: | ScienceDirect |
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