Development of an integrated physical vapour deposition and chemical vapour deposition system
| Autor: | Mundra, S.S., Pardeshi, S.S., Bhavikatti, S.S., Nagras, Atul |
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| Zdroj: | In Materials Today: Proceedings 2021 46 Part 2:1229-1234 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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