Performance analysis of bimorph cantilever beam using piezoelectric materials and MEMS technology

Autor: Rathod, Arun Pratap Singh, Kukreti, Kamlesh, Mishra, Abhilasha, Kumar, Brijesh
Zdroj: In Materials Today: Proceedings 2021 46 Part 20:10865-10869
Databáze: ScienceDirect