A study on improved methods in Micro-electromechanical systems technology

Autor: Aditya Khatokar, J., Vinay, N., Sudhir Bale, Ajay, Nayana, M.A., Harini, R., Suhaas Reddy, V., Soundarya, N., Satheesha, T.Y., Shivashankar Huddar, A.
Zdroj: In Materials Today: Proceedings 2021 43 Part 6:3784-3790
Databáze: ScienceDirect