Characterization of Si-DLC films synthesized by low cost plasma-enhanced chemical vapor deposition
| Autor: | Salimon, Igor A., Temirov, Aleksandr A., Kubasov, Ilya V., Skryleva, Elena A., Kislyuk, Aleksandr M., Turutin, Andrei V., Kiselev, Dmitry A., Ilina, Tatyana S., Zhukov, Roman N., Statnik, Eugene S., Malinkovich, Mikhail D., Parkhomenko, Yuriy N. |
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| Zdroj: | In Materials Today: Proceedings 2020 33 Part 4:1997-2002 |
| Databáze: | ScienceDirect |
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