Investigations of Interface Trap Densities (Dit) and Interface Charges (Qit) for Steep Retrograded Al2O3 and HfO2 based Nano Regime GAA FinFETs
| Autor: | Ranjan Thakur, Rajiv, Singh, Pragati |
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| Zdroj: | In Materials Today: Proceedings 2020 24 Part 3:2011-2018 |
| Databáze: | ScienceDirect |
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