Development of super-smooth flat silicon mirror substrates using bowl-feed chemical-mechanical polishing
| Autor: | Belure, A.R., Biswas, A.K., Raghunathan, D., Rishipal, Bhartiya, S., Singh, Rashmi, Rai, S.K., Pawade, R.S., Kamath, M.P., Benerji, N.S. |
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| Zdroj: | In Materials Today: Proceedings 2020 26 Part 2:2260-2264 |
| Databáze: | ScienceDirect |
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