A systematic review of magnetron sputtering of AlN thin films for extreme condition sensing
| Autor: | Mwema, F.M., Akinlabi, E.T., Oladijo, O.P. |
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| Zdroj: | In Materials Today: Proceedings 2020 26 Part 2:1546-1550 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Mwema, F.M., Akinlabi, E.T., Oladijo, O.P. |
|---|---|
| Zdroj: | In Materials Today: Proceedings 2020 26 Part 2:1546-1550 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect