Studies of SiO2 thin films implanted with 100keV silicon ions

Autor: Vishwakarma, Suraj B., Dubey, Sheshmani K., Dubey, R.L., Bambole, V., Sulania, I., Kanjilal, D.
Zdroj: In Materials Today: Proceedings 2020 23 Part 2:345-351
Databáze: ScienceDirect