ICP etching of SiC with low surface roughness
| Autor: | Osipov, Artem A., Iankevich, Gleb A., Berezenko, Vladimir I., Speshilova, Anastasiya B., Alexandrov, Sergey E. |
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| Zdroj: | In Materials Today: Proceedings 2020 30 Part 3:512-515 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect