Features of the synthesis of lithium-based ternary oxide nanofilms by atomic layer deposition with LHMDS for thin-film LIBs
| Autor: | Maximov, Maxim Yu. ⁎, Koshtyal, Yury, Mitrofanov, Ilya, Ezhov, Ilya, Rumyantsev, Aleksander, Popovich, Anatoly |
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| Zdroj: | In Materials Today: Proceedings 2020 25 Part 1:6-12 |
| Databáze: | ScienceDirect |
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