Precipitation of metal nitride nanoparticles from amorphous (M,Si)-(N,O) thin films (M =Nb, Zr)
| Autor: | Masubuchi, Yuji, Miyamoto, Yuko, Kikkawa, Shinichi |
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| Zdroj: | In Materials Today: Proceedings 2019 16 Part 1:173-179 |
| Databáze: | ScienceDirect |
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