Fabrication of Porous Silicon using Photolithography and Reactive Ion Etching (RIE)
| Autor: | Pratiwi, Nuraini Dian, Handayani, Mita, Suryana, Risa, Nakatsuka, Osamu |
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| Zdroj: | In Materials Today: Proceedings 2019 13 Part 1:92-96 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect