Defect-induced Stress Imaging in Single and Multi-crystalline Semiconductor Materials

Autor: Herms, Martin, Wagner, Matthias, Kayser, Stefan, Kießling, Frank M., Poklad, Anna, Zhao, Ming, Kretzer, Ulrich
Zdroj: In Materials Today: Proceedings 2018 5(6) Part 3:14748-14756
Databáze: ScienceDirect