Glancing-angle pulsed dc magnetron sputtered AZO thin films for TCO applications
Autor: | Seawsakul, Kittikhun, Horprathum, Mati, Eiamchai, Pitak, Pattantsetakul, Viyapol, Limwichean, Saksorn, Muthitamongkol, Pennapa, Thanachayanont, Chanchana, Songsiriritthigul, Prayoon |
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Zdroj: | In Materials Today: Proceedings 2018 5(6) Part 1:14166-14171 |
Databáze: | ScienceDirect |
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