Glancing-angle pulsed dc magnetron sputtered AZO thin films for TCO applications

Autor: Seawsakul, Kittikhun, Horprathum, Mati, Eiamchai, Pitak, Pattantsetakul, Viyapol, Limwichean, Saksorn, Muthitamongkol, Pennapa, Thanachayanont, Chanchana, Songsiriritthigul, Prayoon
Zdroj: In Materials Today: Proceedings 2018 5(6) Part 1:14166-14171
Databáze: ScienceDirect