Effect of pyrolysis process parameters on electrical, physical, chemical and electro-chemical properties of SU-8-derived carbon structures fabricated using the C-MEMS process
| Autor: | Pramanick, Bidhan, Vazquez-Pinon, Matias, Torres-Castro, Alejandro, Martinez-Chapaa, Sergio O., Madou, Marc |
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| Zdroj: | In Materials Today: Proceedings 2018 5(3) Part 3:9669-9682 |
| Databáze: | ScienceDirect |
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