New silicon-based micro-electro-mechanical systems for photo-acoustic trace-gas detection

Autor: Pelini, Jacopo, Dello Russo, Stefano, Lopez Garcia, Inaki, Concetta Canino, Maria, Roncaglia, Alberto, Cancio Pastor, Pablo, Galli, Iacopo, Ren, Wei, De Natale, Paolo, Wang, Zhen, Borri, Simone, Siciliani de Cumis, Mario
Zdroj: In Photoacoustics August 2024 38
Databáze: ScienceDirect