High-sensitivity miniature dual-resonance photoacoustic sensor based on silicon cantilever beam for trace gas sensing
| Autor: | Wu, Guojie, Gong, Zhenfeng, Ma, Junsheng, Li, Haie, Guo, Min, Chen, Ke, Peng, Wei, Yu, Qingxu, Mei, Liang |
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| Zdroj: | In Photoacoustics September 2022 27 |
| Databáze: | ScienceDirect |
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