Enhancing Ellipsometry Analysis with Whale Optimisation: A Novel Approach for Precise Material Characterisation
| Autor: | Ma, Liyuan, Xu, Xipeng, Cui, Changcai, Lou, Shan, Qin, Yuchu, Scott, Paul, Zeng, Wenhan |
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| Zdroj: | In Procedia CIRP 2024 129:127-132 |
| Databáze: | ScienceDirect |
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